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Equipment Automation
PlantU EAP
ControlCoordinateExecute
Equipment Automation Program
It's designed for device information transmission, data acquisition and upload, process control, anomaly detection, and interaction with higher-level systems.
Features
01

Developed on the core STP (SecsTalk Pro) platform, ensuring short development cycles and ease of maintenance.

02

Supports communication with multiple engines simultaneously, with each engine operating independently or interacting with others, featuring automatic logging of communication status.

03

Enables multithreading, event-driven programming, and dynamic DLL loading.

04

Utilizes State Machine technology specialized for code-logic separation, facilitating various EAP process implementations (Control Job, Process Job, Batch, Lot, and Load Port).

05

Offers flexible simulation capabilities, dynamically mimicking devices, MES, APC, and other upper-level systems for convenient testing..

06

The system provides conversion between SECSI and HSMS protocols and integration of Non-SECS components.

07

Supports communication with upper-level systems using message middleware like Tibco RV, web service, CORBA, MBX, H101, and PLUS.

Build Effect
Benefits
01

Replace manual operation with automatic operation helps avoid human error.

02

When combined with APC and other systems, it can enhance product yield and quality.

03

This automation reduces numerous manual operations, thereby enhancing operational efficiency and cutting labor costs.

04

Additionally, automatically halting the machine in case of abnormalities prevents subsequent wafer operations from being affected.

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